CMOS Plasma and Process Damage
Hardback or Cased Book 00466 pages May 17, 2025
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This book discusses the complex technology of building CMOS computer chips and covers some of the unusual problems that can occur during chip manufacturing. Readers will learn how plasma and process damage results from the high-energy processes that are used in chip manufacturing, causing harm to the chips, functional failure and reliability problems.
- Author:
- Kirk Prall
- Publisher:
- Springer
- Publication Date:
- May 17, 2025
- Number of pages:
- 00466 pages
- Binding:
- Hardback or Cased Book
- ISBN-10:
- 3031890280
- ISBN-13:
- 9783031890284