Ion Implantation
Hardback or Cased Book 452 pages May 30, 2012
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Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
- Author:
- Mark Goorsky
- Publisher:
- Intechopen
- Publication Date:
- May 30, 2012
- Number of pages:
- 452 pages
- Binding:
- Hardback or Cased Book
- ISBN-10:
- 9535106341
- ISBN-13:
- 9789535106340