Microlithography: Science and Technology
Hardcover 900 pages English May 20, 2020
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Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
- Author:
- Bruce W. Smith|Kazuaki Suzuki
- Publisher:
- CRC Press
- Publication Date:
- May 20, 2020
- Number of pages:
- 900 pages
- Language:
- English
- Binding:
- Hardcover
- ISBN-10:
- 1439876754
- ISBN-13:
- 9781439876756