Process Variations in Microsystems Manufacturing
Hardcover 540 pages English April 10, 2020
(No reviews yet)
Write a Review
Write a Review
Springer
Process Variations in Microsystems Manufacturing
Millions of titlesEvery book you're looking for
Carbon-neutral shippingFree on orders over $39.99
Fast shipping worldwideDelivered to your door
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
- Author:
- Michael Huff
- Publisher:
- Springer
- Publication Date:
- April 10, 2020
- Number of pages:
- 540 pages
- Language:
- English
- Binding:
- Hardcover
- ISBN-10:
- 3030405583
- ISBN-13:
- 9783030405588