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Semiconductor Sensors

by Simon M. Sze

Wiley-Interscience

Hardback or Cased Book 576 pages Oct 28, 1994

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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends. A solutions manual is available upon request from the Wiley editorial board.

Author:: Simon M. Sze
Publisher:: Wiley-Interscience
Publication Date:: Oct 28, 1994
Number of pages:: 576 pages
Binding:: Hardback or Cased Book
ISBN-10:: 0471546097
ISBN-13:: 9780471546092

Semiconductor Sensors

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John Wiley & Sons

Semiconductor Sensors